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Plasma techniques for film deposition

621.38152/KON/P

7744

Konuma,Mitsuharu
        Plasma techniques for film deposition / Mitsuharu Konuma . – Harrow : Alpha Science International, c2005
        ix,337p.
        ISBN9781842651513 :
        1. Plasma-enhanced chemical vapor deposition
        1. Thin films

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