Fundamentals of Semiconductor Fabrication




621.38152/MAY/F



45174

May, Gary S.
        Fundamentals of Semiconductor Fabrication / Gary S. May and Simon M. Sze . – Wiley Student ed. . – New York : Wiley, c2004
        xiii, 305 p.
        ISBN9788126532605 :
        1. Semiconductors – Design and construction.
        1. Integrated circuits – Design and construction.         I. Sze, S. M., 1936-

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