Entry Personal Name

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 22774

003 - CONTROL NUMBER IDENTIFIER

• control field: IN-KoAU

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20251030114248.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 251030|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: IN-KoAU
• Transcribing agency: IN-KoAU

100 ## - HEADING--PERSONAL NAME

• Personal name: May, Gary S

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (IN-KoAU)31305: May, Gary S., Fundamentals of Semiconductor Fabrication , c2004