TY  - BOOK
AU  - Konuma,Mitsuharu
TI  - Plasma techniques for film deposition
SN  - 9781842651513
U1  - 621.38152/KON/P 
PY  - 2005///
CY  - Harrow
PB  - Alpha Science International
KW  - Plasma-enhanced chemical vapor deposition
KW  - Thin films
ER  -