Brodie, Ivor
The Physics Of Micro/Nano-Fabrication / Ivor Brodie and Julius J. Murray
. – New York : Springer Science+Business Media LLC, 1992
xix, 650p.
. – ( Microdevices)
ISBN9781441932211 :
1. MIcroelectronics 1. Thin-film Circuits
I. Murray, Julius J.