TY  - BOOK
AU  - Brodie, Ivor
AU  - Murray, Julius J.  
TI  - The Physics Of Micro/Nano-Fabrication 
SN  - 9781441932211
U1  - 621.381/BRO/P 
PY  - 1992///
CY  - New York
PB  - Springer Science+Business Media LLC
KW  - MIcroelectronics
KW  - Thin-film Circuits
ER  -