TY  - BOOK
AU  - May, Gary S.
AU  - Sze,S.M.
TI  - Fundamentals of Semiconductor Fabrication 
SN  - 9788126532605
U1  - 621.38152/MAY/F 
PY  - 2004///
CY  - New York 
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
ER  -