| 000 | 00563nam a2200205Ia 4500 | ||
|---|---|---|---|
| 003 | Aliah University | ||
| 005 | 20180326111934.0 | ||
| 008 | 161222s9999 xx 000 0 und d | ||
| 020 | _a9781842651513 | ||
| 040 | _beng | ||
| 041 | _aEnglish | ||
| 082 | _a621.38152/KON/P | ||
| 100 | _aKonuma,Mitsuharu | ||
| 245 |
_aPlasma techniques for film deposition _cMitsuharu Konuma |
||
| 260 |
_aHarrow _bAlpha Science International _cc2005 |
||
| 300 | _aix,337p. | ||
| 650 | _aPlasma-enhanced chemical vapor deposition | ||
| 650 | _aThin films | ||
| 942 | _cBK | ||
| 999 |
_c2749 _d2749 |
||