| 000 | 00368nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 161222s9999 xx 000 0 und d | ||
| 020 | _cRS. 549.00 | ||
| 082 | _a621.38152 MAY 005 | ||
| 100 | _aGary S. May and Simon M. Szee | ||
| 245 |
_aFundamentals of sdemiconductor fabrication _cGary S. May and Simon M. Szee |
||
| 260 |
_aNew Delhi _bWiley India _c2004 |
||
| 300 | _a305 | ||
| 999 |
_c3419 _d3419 |
||