000 00368nam a2200121Ia 4500
008 161222s9999 xx 000 0 und d
020 _cRS. 549.00
082 _a621.38152 MAY 005
100 _aGary S. May and Simon M. Szee
245 _aFundamentals of sdemiconductor fabrication
_cGary S. May and Simon M. Szee
260 _aNew Delhi
_bWiley India
_c2004
300 _a305
999 _c3419
_d3419